SLNSW-Journal of vacuum science & technology. B, Microe...-74VKpVjLPAAg

Journal of vacuum science & technology. B, Microelectronics and nanometer structures : processing, measurement, and phenomena : an official journal of the American Vacuum Society.

Full title: Journal of vacuum science & technology. B, Microelectronics and nanometer structures : processing, measurement, and phenomena : an official journal of the American Vacuum Society.

Author/creator: American Vacuum Society.

Call Numbers: NQ533.506/4

Record Identifier: 74VKpVjLPAAg

Language: English

Formats: Journals

Contents: v. : ill. ; 29 cm., , 2nd ser., v. 9, no. 1 (Jan./Feb. 1991)-

Publishers: New York : Published for the Society by the American Institute of Physics, c1991-

Notes: Title from cover. On cover, <Sept./Oct. 1994->: JVST B.

Permalink: https://collection.sl.nsw.gov.au/record/74VKpVjLPAAg

DDC: 621.38105

MMS ID: 991019308249702626

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    Record title

    Journal of vacuum science & technology. B, Microelectronics and nanometer structures : processing, measurement, and phenomena : an official journal of the American Vacuum Society.

    Call numbers

    NQ533.506/4

    Record identifier

    74VKpVjLPAAg

    Record permalink

    https://collection.sl.nsw.gov.au/record/74VKpVjLPAAg

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    Journal of vacuum science & technology. B, Microelectronics and nanometer structures : processing, measurement, and phenomena : an official journal of the American Vacuum Society.

    https://collection.sl.nsw.gov.au/record/74VKpVjLPAAg

    Journal of vacuum science & technology. B, Microelectronics and nanometer structures : processing, measurement, and phenomena : an official journal of the American Vacuum Society.

    Full title

    Journal of vacuum science & technology. B, Microelectronics and nanometer structures : processing, measurement, and phenomena : an official journal of the American Vacuum Society.

    Publisher

    New York : Published for the Society by the American Institute of Physics, c1991-

    Call Numbers

    NQ533.506/4

    Record Identifier

    74VKpVjLPAAg

    Language

    English

    Formats

    Journals

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    Vacuum microelectronics--Periodicals Microelectronics--Periodicals Nanoparticles--Measurement--Periodicals

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    NQ533.506/4

    Record Identifier

    74VKpVjLPAAg

    Permalink

    https://collection.sl.nsw.gov.au/record/74VKpVjLPAAg

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